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TNBF-6565 Baking Furnace (Double-sided Heater type)
※unit(mm)
Heat zone 650 x 650 x 600H ※Can be changed according to consumer needs
Max temp 1500℃ ∼ 2900℃
Degree of vacuum Around 10(-2) torr ※When attaching a diffusion pump, around 10(-5) torr
Used Gas H2, N2, Ar, HCl, Cl2
Utility Power 90KVA, Cooling water, Process Gas, Air
Optional items
  • Zone control method is manufactured according to consumer needs
  • Forced cooling system
  • Automatic door open method by air cylinder method
  • CE, SEMI standard certification
TNBF-9090 Multistage Heater Furnace
※unit(mm)
Heat zone 1000 x 1000 x 650H, 6 stages ※Size and the number of stages can be changed according to consumer needs
Max temp 1500℃ ∼ 2900℃
Degree of vacuum Around 10(-2) torr ※When attaching a diffusion pump, around 10(-5) torr
Used Gas H2, N2, Ar, HCl, Cl2
Utility Power 180KVA, Cooling water, Process Gas, Air
Optional items
  • Zone control method is manufactured according to consumer needs
  • Forced cooling system
  • Automatic door open method by air cylinder method
  • CE, SEMI standard certification
Characteristic
  • 1) Putting samples on the heater and firing them from the top and bottom would make the temperature distribution excellent.
  • 2) The effective heating zone is wider than the capacity of the furnace, so the heat efficiency, power consumption, and process gas consumption are small.
TNGF-4410 FOUR FACES HEATER TYPE (SQUARE TYPE CHAMBER)
※unit(mm)
Heat zone 1200 x 1000H x 1700D ※Can be changed according to consumer needs
Max temp 1700℃
Product size 1000W x 800H x 1500D(mm)
Degree of vacuum Around 10(-2) torr
Used Gas N2, Ar, Vacuum
Utility Power 300KVA, Cooling water, Process Gas, Air
Heater Graphite Rod Type Heater
Insulating material Graphite Molded Insulating material
Zone control method 2 Zone Control Method
TNGF-4609 SIX FACES HEATER TYPE (SQUARE TYPE CHAMBER)
※unit(mm)
Heat zone 900W x 1100D x 850H ※Can be changed according to consumer needs
Max temp 1850℃
Degree of vacuum Around 10(-5) torr Diffusion Pump + MBP + Rotary Pumping
Used gas N2, Ar, Vacuum
Utility Power 400KVA, cooling water, process gas, air
Heater Graphite Rod Type Heater Top/bottom/left/right/front/rear 6 faces heating method
Insulating material Graphite molded insulating material
Zone control method 4 Zone control method
Inner Box Attaching tungsten plate inside the graphite inner box
Cooling device Forced cooling method was attached
TNGF-4614 6 FACES HEATER TYPE (SQUARE TYPE CHAMBER)
※unit(mm)
Heat zone 1400W x 1400D x 800H ※Can be changed according to consumer needs
Max temp 2650℃
Degree of vacuum Dry pump for substitution was used
Used Gas N2, Ar
Utility Power 800KVA, cooling water, process gas, air
Heater Graphite Rod Type Heater Top/bottom/left/right/front/rear 6 faces heating method
Insulating material Graphite molded insulating materia
Zone control method 4 Zone control method Binder Trap
TNGF-0405 4 FACES HEATER TYPE (ROUND TYPE CHAMBER)
※unit(mm)
Heat zone 550 x 550 x 1100D ※Can be changed according to consumer needs
Product dimensions 450 x 500 x 950D(mm)
Max temp 1700℃
Degree of vacuum Around 10(-5) torr (Diffusion pump is attached)
Used Gas N2, Ar, Vacuum
Utility Power 150KVA, cooling water, process gas, air
Heater Graphite Rod Type Heater
Insulating material Graphite molded insulating material
Zone control method 2 Zone control method
TNGF-0006 ROUNDE TYPE HEATER (ROUND TYPE CHAMBER)
※unit(mm)
Heat zone 650 Dia. x 1520D ※Can be changed according to consumer needs
Max temp 1800℃
Degree of vacuum Around 10(-2) torr
Utility Power 150KVA, cooling water, process gas, air
Heater Graphite Rod Type Heater
Insulating material Graphite molded insulating material
Zone control method 2 Zone control method
Atmosphere Ar carrier operation method
TNGF-00T02 ROUND TYPE HEATER (TOP LOADING METHOD)
※unit(mm)
Heat zone 260 Dia. x 350H ※Can be changed according to consumer needs
Max temp Use at 2800℃, maximum 3000℃
Utility Power 130KVA, cooling water, process gas
Heater Graphite Round Type Heate
Insulating material Graphite Soft Felt
Atmosphere Ar
Space for installation 2500W x 2000D x 1900H(mm)
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