Heat zone | 650 x 650 x 600H ※Can be changed according to consumer needs |
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Max temp | 1500℃ ∼ 2900℃ |
Degree of vacuum | Around 10(-2) torr ※When attaching a diffusion pump, around 10(-5) torr |
Used Gas | H2, N2, Ar, HCl, Cl2 |
Utility | Power 90KVA, Cooling water, Process Gas, Air |
Optional items |
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Heat zone | 1000 x 1000 x 650H, 6단 ※Size and the number of stages can be changed according to consumer needs. |
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Max temp | 1500℃ ∼ 2900℃ |
Degree of vacuum | Around 10(-2) torr ※When attaching a diffusion pump, around 10(-5) torr |
Used Gas | H2, N2, Ar, HCl, Cl2 |
Utility | Power 180KVA, Cooling water, Process Gas, Air |
Optional items |
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Characteristic |
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Heat zone | 2000L ∼ 8000L x 1000W x 70H ※Can be changed according to consumer needs |
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Max temp | 2400℃ ※Can be changed according to consumer needs |
Heater | Graphite Rod Type Heater |
Insulating material | Graphite molded insulating material |
Rail | Graphite |
Conveyor | Pursher or Roll to Roll method |
Used Gas | N2, Ar |
Utlity | Power 200KVA, cooling water, process gas, air |
Purpose |
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Zone control method | Optical Pyrometer Control |
Heat zone | 260 Dia. x 7500L ※Can be changed according to consumer needs |
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Max temp | 2900℃ ※Can be changed from 1000 ~ 2900℃ according to consumer needs |
Furnace body dimensions | 9900L x 1100W x 1100H |
Furnace installation area | 23000L x 7000W x 3000H |
Heater | Graphite Round Type Heater |
Insulating material | Graphite molded insulating material |
Rail | Gaphite |
Used Gas | N2(Up to 2400℃), Ar |
Utlity | Power 500KVA, cooling water, process gas, air |
Purpose |
|
Zone control method | Optimal Pyrometer Control |
Heat zone | Consumer demand |
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Heater | Al2O3 Sheath Heater |
Insulating material | Al2O3 molded insulating material |
Atmosphere | Various gases such as air, N2, Ar, NH3, O2, etc. |
Plate for loading samples | Al2O3 Plate |
Characteristics |
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